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10-K - 10-K - AXCELIS TECHNOLOGIES INCa2202563z10-k.htm
EX-21.1 - EX-21.1 - AXCELIS TECHNOLOGIES INCa2202563zex-21_1.htm
EX-32.1 - EX-32.1 - AXCELIS TECHNOLOGIES INCa2202563zex-32_1.htm
EX-23.1 - EX-23.1 - AXCELIS TECHNOLOGIES INCa2202563zex-23_1.htm
EX-31.1 - EX-31.1 - AXCELIS TECHNOLOGIES INCa2202563zex-31_1.htm
EX-32.2 - EX-32.2 - AXCELIS TECHNOLOGIES INCa2202563zex-32_2.htm
EX-10.9 - EX-10.9 - AXCELIS TECHNOLOGIES INCa2202563zex-10_9.htm
EX-31.2 - EX-31.2 - AXCELIS TECHNOLOGIES INCa2202563zex-31_2.htm

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Exhibit 10.10

Axcelis Technologies, Inc.
Non-Employee Director Cash Compensation at March 14, 2011

        This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the "Company") and each of its non-employee directors. Axcelis provides both cash retainers and meeting fees to its non-employee directors, as follows:

Annual Retainers (paid quarterly in advance)

Board Member Position
  Amount  

Lead Director

  $ 50,000  

Non-Employee Board Member (not Lead Director)

  $ 30,000  

Audit Committee Chair*

  $ 15,000  

Compensation Committee Chair*

  $ 10,000  

Nominating Committee Chair*

  $ 7,500  

*
Retainers for Committee Chairs are in addition to the retainer payable to all non-employee Board members.

Meeting Fees (payable quarterly in arrears)

Meeting Type
  Amount Per Meeting  

In Person Board Meetings

  $ 2,000  

Telephone Board Meetings

  $ 1,000  

In Person or Telephone Committee Meetings**

  $ 1,000  

**
Committee meeting fees are paid only to committee members, and not to other Board me members, attending committee meetings.

        Non-employee directors also receive reimbursement of out-of-pocket expenses incurred in attending Board and committee meetings. Non-employee directors do not receive any Company-paid perquisites.




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