Attached files

file filename
EX-23.1 - RUDOLPH TECHNOLOGIES INCexhibit2312010.htm
10-K - RUDOLPH TECHNOLOGIES INCrtec1231201010k.htm
EX-32.2 - RUDOLPH TECHNOLOGIES INCrtec12312010ex322.htm
EX-32.1 - RUDOLPH TECHNOLOGIES INCrtec12312010ex321.htm
EX-31.2 - RUDOLPH TECHNOLOGIES INCrtec12312010ex312.htm
EX-31.1 - RUDOLPH TECHNOLOGIES INCrtec12312010ex311.htm
 

Exhibit 21.1
 
SUBSIDIARIES
Name
 
Jurisdiction
Rudolph Technologies Europe, B.V.
 
Netherlands
Rudolph Technologies Japan KK
 
Japan
Rudolph Technologies (Shanghai) Trading Co., Ltd.
 
China
August Technologies Corporation
 
Minnesota