Attached files
| file | filename |
|---|---|
| 10-K - FORM 10-K - INTEVAC INC | f58409e10vk.htm |
| EX-31.1 - EX-31.1 - INTEVAC INC | f58409exv31w1.htm |
| EX-21.1 - EX-21.1 - INTEVAC INC | f58409exv21w1.htm |
| EX-10.4 - EX-10.4 - INTEVAC INC | f58409exv10w4.htm |
| EX-32.1 - EX-32.1 - INTEVAC INC | f58409exv32w1.htm |
| EX-23.2 - EX-23.2 - INTEVAC INC | f58409exv23w2.htm |
| EX-31.2 - EX-31.2 - INTEVAC INC | f58409exv31w2.htm |
Exhibit 23.1
CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We have issued our reports dated February 25, 2011, with respect to the consolidated financial
statements, schedule, and internal control over financial reporting included in the Annual Report
of Intevac, Inc. and subsidiaries on Form 10-K for the year ended December 31, 2010. We hereby
consent to the incorporation by reference of said reports in the Registration Statements of
Intevac, Inc. and subsidiaries on Forms S-8 (File No. 333-168505, effective August 3, 2010; File
No. 333-160596, effective July 15, 2009; File No. 333-152773, effective August 5, 2008; File No.
333-143418, effective May 31, 2007; File No. 333-134422, effective May 24, 2006; File No.
333-125523, effective June 6, 2005; File No. 333-109260, effective September 29, 2003; File No.
333-106960, effective July 11, 2003; File No. 333-50166, effective November 17, 2000; and File No.
333-65421, effective October 7, 1998).
/s/ GRANT THORNTON LLP
San Jose, California
February 25, 2011
February 25, 2011