Attached files

file filename
10-K - FORM 10-K - KLA CORPd10k.htm
EX-32 - CERTIFICATION OF CEO AND CFO PURSUANT TO 18 U.S.C. SECTION 1350 - KLA CORPdex32.htm
EX-31.1 - CERTIFICATION OF CEO UNDER RULE 13A-14(A) - KLA CORPdex311.htm
EX-21.1 - LIST OF SUBSIDIARIES - KLA CORPdex211.htm
EX-31.2 - CERTIFICATION OF CFO UNDER RULE 13A-14(A) - KLA CORPdex312.htm
EX-12.1 - COMPUTATION OF RATIO OF EARNINGS TO FIXED CHARGES - KLA CORPdex121.htm

Exhibit 23.1

Consent of Independent Registered Public Accounting Firm

We hereby consent to the incorporation by reference in the Registration Statements on Form S-3 (No. 333-150473) and Form S-8 (No. 33-26002, No. 33-42973, No. 33-42975, No. 33-88662, No. 333-03003, No. 333-22941, No. 333-26681, No. 333-32537, No. 333-45271, No. 333-60883, No. 333-60887, No. 333-68415, No. 333-68423, No. 333-85121, No. 333-85123, No. 333-49828, No. 333-60864, No. 333-75944, No. 333-100166, No. 333-113358, No. 333-120218, No. 333-121637, No. 333-129868, No. 333-140743, No. 333-144003, No. 333-147434, No. 333-147437, No. 333-152864, No. 333-159017 and No. 333-162887) of KLA-Tencor Corporation of our report dated August 5, 2010 relating to the financial statements, financial statement schedule and the effectiveness of internal control over financial reporting, which appears in this Form 10-K.

 

/s/ PricewaterhouseCoopers LLP

San Jose, California

August 5, 2010